000 00323nam a2200121Ia 4500
008 230913s9999 xx 000 0 und d
100 _a, Campbell
245 4 _aThe Science And Engineering Of Microelectronic Fabrication
260 _aNEW DELHI
260 _bOXFORD
260 _c2010
650 _aElectronics Engineering
999 _c134789
_d134789